| 摘要 |
PROBLEM TO BE SOLVED: To improve throughput in measuring dimensions, a shape, a surface step, and surface roughness in the vicinity of a magnetic head main pole using an AFM. ! SOLUTION: A method for measuring a surface shape of a magnetic head element includes: forming optical images of a magnetic head element as measuring object and a cantilever; estimating a write magnetic field generating region of a magnetic head element from the image obtained by imaging; scanning a first region in which, with a magnetic field generated in the write magnetic field generating region, a lower end of vertical vibration of a probe formed near the tip of the cantilever and including a magnetic film formed on a surface includes the write magnetic field generating region estimated at a certain height from the surface of the magnetic head element; identifying a region within the first region where the write magnetic field is generated, from data obtained by scanning; scanning a second region including the region where the w |
