发明名称 MAKING AN EFUSE
摘要 A wafer chip and a method of designing the chip is disclosed. A first fuse is formed having a first critical dimension and a second fuse having a second critical dimension are formed in a layer of the chip. A voltage may be applied to burn out at least one of the first fuse and the second fuse. The first critical dimension of the first fuse may result from applying a first mask to the layer and applying light having a first property to the mask. The second critical dimension of the second fuse may result from applying a second mask to the layer and applying light having a second property to the mask.
申请公布号 US2015155238(A1) 申请公布日期 2015.06.04
申请号 US201514608807 申请日期 2015.01.29
申请人 INTERNATIONAL BUSINESS MACHINES CORPATION 发明人 Chen Hsueh-Chung;Tseng Chiahsun;Yeh Chun-Chen;Zhao Ailian
分类号 H01L23/525 主分类号 H01L23/525
代理机构 代理人
主权项 1. A wafer chip, comprising: a first fuse having a first critical dimension formed in a layer of the wafer chip; and a second fuse having a second critical dimension formed in the layer of the wafer chip; wherein the first fuse and the second fuse are configured to burn out at different applied voltages.
地址 Armonk NY US
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