| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate transport device having pads capable of vacuum sucking and replacing a substrate, while absorbing the warpage of the substrate.SOLUTION: A substrate transport device includes a plurality of pads each including a flange and holding a substrate, and a hand having a plurality of recesses, and fixing the plurality of pads inserted into the plurality of recesses removably. At least any one of the flanges has an elastic part fixed replaceably to the hand by the outer edge of the flange, and capable of deflecting in the recess, and a substrate holding part rising at the inner edge of the elastic part, and holding the substrate by vacuum suction.</p> |
