| 摘要 |
PROBLEM TO BE SOLVED: To provide a light source device capable of efficiently treating an object to be treated, in which recessed parts are formed and which is made of a wiring board material, in a short time, and a desmear treatment device equipped with the light source device. ! SOLUTION: This light source device includes an ultraviolet radiation lamp for radiating vacuum ultraviolet rays toward the object to be treated, in which the recessed parts are formed and which is made of the wiring board material, a light-transmissive window unit disposed between the treated surface of the object to be treated and the ultraviolet radiation lamp. The light-transmissive window unit includes a first plate member disposed on the ultraviolet radiation lamp side and made of silica glass and a second plate member disposed on the side of the object to be treated, a gas introduction part for introducing treatment gas into a gap between the plate members is provided, a gas supply port by a through hole passing through the |
