RESISTANCE CHANGE ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a resistance change element in which high resistance ratio window, endurance and a stable electrode having less resistance fluctuation are achieved. ! SOLUTION: A resistance change element includes: a first electrode 11 and a second electrode 15; a resistance change layer 13 containing oxygen and a first metal; a resistance layer 14 which is arranged between the second electrode 15 and the resistance change layer 13, which includes oxygen and the second metal different from the first metal, and whose specific resistance is 1000 μ Ω cm or less; and a diffusion prevention layer 12 which is arranged between the first electrode 11 and the resistance change layer 13 and which has characteristics for preventing oxygen supplied from the resistance layer 14 to the resistance change layer 13 from being diffused to the first electrode 11. ! COPYRIGHT: (C)2015,JPO&INPIT