| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide device in which a light-receiving element can be accurately arranged with respect to a diffused waveguide formed on a dielectric substrate. ! SOLUTION: The optical waveguide device includes a dielectric substrate 1, diffused waveguides 20 to 22 formed by thermally diffusing a high refractive index material on the dielectric substrate, and a light-receiving element 4 disposed above the diffused waveguides and receiving a part of light waves propagating in the diffused waveguides. The light-receiving element 4 is disposed and fixed on a pedestal 3 formed on the dielectric substrate. At least a part of the pedestal is formed by thermally diffusing the same high refractive index material as the high refractive index material constituting the diffused waveguides, and is composed of a set of lines having a width approximately equal to the line width of the diffused waveguides. ! COPYRIGHT: (C)2015,JPO&INPIT |
