METHOD OF PREPARING HETEROGENEOUS STACKED CO-FIRED CERAMIC FOR USE IN AN ALUMINUM NITRIDE ELECTROSTATIC CHUCK

摘要

A method of preparing a heterogeneous stacked co-fired ceramic for use in an aluminum nitride-based electrostatic chuck includes providing a first aluminum nitride blank layer; applying a metal ink to the first aluminum nitride blank layer to form thereon an electrostatic electrode layer by screen printing, wherein the metal ink mainly contains a metal of high melting point; stacking a second aluminum nitride blank layer on the electrostatic electrode layer; laminating the first aluminum nitride blank layer, the electrostatic electrode layer, and the second aluminum nitride blank layer (collectively known as a heterogeneous ceramic) together; and co-firing the laminated heterogeneous ceramic in accordance with a sintering temperature rising curve to prepare the heterogeneous stacked co-fired ceramic characterized by reduced differences in sintering shrinkage ratio between the electrostatic electrode and aluminum nitride blank and enhanced strength and adhesion of the interface between the electrostatic electrode and aluminum nitride blank.

主权项

1. A method of preparing a heterogeneous stacked co-fired ceramic for use in an aluminum nitride-based electrostatic chuck, the method comprising the steps of:
(A) providing a first aluminum nitride blank layer; (B) applying a metal ink to the first aluminum nitride blank layer to form thereon an electrostatic electrode layer by screen printing; (C) stacking a second aluminum nitride blank layer on the electrostatic electrode layer, wherein the first aluminum nitride blank layer, the electrostatic electrode layer, and the second aluminum nitride blank layer thus stacked up are collectively known as a heterogeneous ceramic; (D) performing lamination on the heterogeneous ceramic at a temperature of 70-130° C. and a pressure of 30-50 MPa; and (E) co-firing the laminated heterogeneous ceramic at temperature increasing from a room temperature to a co-firing temperature according to a sintering temperature rising curve so as to prepare the heterogeneous stacked co-fired ceramic.