| 发明名称 |
DRAWING APPARATUS, DRAWING METHOD, AND METHOD FOR MANUFACTURING ARTICLE |
| 摘要 |
An apparatus draws a pattern on a substrate using a plurality of beams. The drawing apparatus includes a control unit configured to control the plurality of beams in units of a plurality of beam groups, a number of the plurality of beam groups being smaller than the number of the plurality of beams, and an instruction unit configured to provide an instruction to the control unit. The instruction unit provides the instruction by adjusting a combination of beam groups to be used for drawing at a certain position on the substrate, based on information about a defective beam among the plurality of beams. |
| 申请公布号 |
US2015155130(A1) |
申请公布日期 |
2015.06.04 |
| 申请号 |
US201414553834 |
申请日期 |
2014.11.25 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Kikuchi Kazuya |
| 分类号 |
H01J37/24;H01J37/244;H01J37/147;H01J37/04;H01J37/317;H01J37/12 |
主分类号 |
H01J37/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus that draws a pattern on a substrate using a plurality of beams, comprising:
a control unit configured to control the plurality of beams in units of a plurality of beam groups, a number of the plurality of beam groups being smaller than the number of the plurality of beams; and an instruction unit configured to provide an instruction to the control unit, wherein the instruction unit provides the instruction by adjusting a combination of beam groups to be used for drawing at a certain position on the substrate, based on information about a defective beam among the plurality of beams. |
| 地址 |
Tokyo JP |
