发明名称 PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric device in which a sealing material can be prevented from flowing into the internal space of a base, while ensuring the bonding strength of a lid and the base eve if compaction progresses. ! SOLUTION: In an area of the side face of a base 2, used in a crystal oscillator 1, the area including the end on the bonding surface side to a lid 3, a plurality of grooves 7 elongating in the height direction of the base are formed irregularly and continuously. In a state where the lid 3 is bonded to the base 2, the peripheral edge of the lid 3 is located on the outside of the deepest part (7V) of the plurality of grooves 7 in the base 2, in the plan view, and a fillet F of a sealing material S is formed from the lower surface of the lid 3 at least to the inside of the plurality of grooves 7. ! COPYRIGHT: (C)2015,JPO&INPIT
申请公布号 JP2015103829(A) 申请公布日期 2015.06.04
申请号 JP20130240540 申请日期 2013.11.21
申请人 DAISHINKU CORP 发明人 NAKANISHI KENTARO
分类号 H03H9/02;H01L23/02;H03H3/02 主分类号 H03H9/02
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