| 摘要 |
PROBLEM TO BE SOLVED: To shorten a period of unstable droplet discharge state during actual use while suppressing increase of a manufacturing cost. ! SOLUTION: A vibration plate 21 is formed on one surface of a flow passage formation substrate 20 where a pressure generating chamber 31 communicating with a nozzle 41 for discharging a liquid is formed, and a piezoelectric element 22 containing a lower electrode film 22a, a piezoelectric body layer 22b, and an upper electrode film 22c is formed on the vibration plate. A protection substrate 10 which seals the piezoelectric element 22 is provided on an installation side of the piezoelectric element 22, and the pressure generating chamber 31 is formed on the side opposite to a formation side of the flow passage formation substrate 20 of the piezoelectric element 22. After that, in a state where the pressure generating chamber side is at a negative pressure relative to a space in which the piezoelectric element 22 is present, the piezoelectric element 22 is appl |
