ULTRASONIC TRANSDUCER DEVICE, ULTRASONIC MEASUREMENT APPARATUS, AND ULTRASONIC IMAGING APPARATUS

摘要

An ultrasonic transducer device includes a substrate in which a first opening and a second opening are provided, a first ultrasonic transducer element that is formed on the substrate in correspondence with the first opening, and a second ultrasonic transducer element that is formed on the substrate in correspondence with the second opening. The first opening has a first edge portion on a first direction side and a second edge portion on a second direction side, the first direction corresponding to a scan direction and the second direction being in the opposite direction to the first direction. Also, the first ultrasonic transducer element includes a first vibrating film that blocks the first opening, and a first piezoelectric layer that is provided on the first vibrating film so as to cover the first edge portion of the first opening in plan view from a thickness direction of the substrate.

主权项

1. An ultrasonic transducer device comprising:
a substrate in which a first opening and a second opening are provided; a first ultrasonic transducer element that is formed on the substrate in correspondence with the first opening; and a second ultrasonic transducer element that is formed on the substrate in correspondence with the second opening; wherein the first opening has a first edge portion on a first direction side and a second edge portion on a second direction side, the first direction corresponding to a scan direction and the second direction being in the opposite direction to the first direction, and the first ultrasonic transducer element includes: a first vibrating film that blocks the first opening; and a first piezoelectric layer that is provided on the first vibrating film so as to cover the first edge portion of the first opening in plan view from a thickness direction of the substrate.