| 摘要 |
PROBLEM TO BE SOLVED: To improve workability of substrate taking-in/out in a configuration in which inspection machines are vertically arrayed.SOLUTION: An inspection device includes: first and second inspection machines into and from which substrates are taken to inspect taken-in substrates; a first stage which has the first inspection machine placed thereon and is movable to a first taking-in/out position in which the substrate is taken into and out from the first inspection machine and a first inspection position above the first taking-in/out position, in which the first inspection machine being inspecting the substrate taken in the first taking-in/out position is to be located; a second stage which is disposed below the first stage and has the second inspection machine placed thereon and is movable to a second taking-in/out position in which the substrate is taken into and out from the second inspection machine and a second inspection position below the second taking-in/out position, in which the second inspection machine being inspecting the substrate taken in the second first taking-in/out position is to be located; and an elevation mechanism which raises or lowers the first stage to the first taking-in/out position and the first inspection position and raises or lowers the second stage to the second taking-in/out position and the second inspection position. |
