| 摘要 |
PROBLEM TO BE SOLVED: To provide a continuous type heating furnace with a more flexible transport system, which is in particular suitable for use in a soft solder die bonder.SOLUTION: A continuous type heating furnace for a substrate comprises a heating furnace 1 which includes a channel and a transport system for the transport of the substrate 3 through the channel. The channel is bounded by a base 4, a front side wall, a rear side wall and a top part. The base 4 has a plurality of first holes 8 which are connectable to a protective gas source 9 so that protective gas can be supplied during operation. The front side wall of the channel comprises a longitudinal slit which extends parallel to a passage direction 10 thereof and is bounded by a lower edge 12 and an upper edge. The transport system comprises at least one clamp 15 for transporting the substrate 3 through the channel. The clamp 15 is movable back and forth along the longitudinal slit of the channel. |
