发明名称 METHOD FOR MANUFACTURING TOUCH PAD, AND TOUCH PAD
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a touch pad, and a touch pad, in which complication in works of manufacturing is prevented, materials can be reduced, and burrs can be easily removed.SOLUTION: The method for manufacturing a touch pad aims manufacturing a touch pad which includes an insulating base film 1 and a conductive pattern layer 6 formed on the surface of the base film 1 and having a plurality of conductive parts such as electrodes spaced and arrayed in XY directions. The method comprises: depositing a resist layer on the base film 1; exposing the resist layer through a mask and developing to form a resist pattern layer; forming a metal thin film over the base film 1 and the resist pattern layer; removing the resist pattern layer with a part of the layered metal thin film to form a pattern in a residue of the metal thin film to form the conductive pattern layer 6; and dry-etching the conductive pattern layer 6 on the base film 1. As burrs in the conductive pattern layer 6 are removed by dry etching, formation of an overhang part for preventing burrs is unnecessary.
申请公布号 JP2015102890(A) 申请公布日期 2015.06.04
申请号 JP20130240837 申请日期 2013.11.21
申请人 SHIN ETSU POLYMER CO LTD 发明人 SHIMADA HIROSHI ; YAMAZAKI KOICHI
分类号 G06F3/041;G06F3/0354;G06F3/044 主分类号 G06F3/041
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