发明名称 DUCT MEMBER
摘要 The present invention is provided with: a first substrate having a first primary surface; a second substrate having a second primary surface; a joining member that joins the first primary surface and the second primary surface; and a duct that is positioned between the first substrate and the second substrate and that is along a direction parallel to the first primary surface and second primary surface. The joining member has a protrusion that protrudes towards the inside of the duct from between the first primary surface and the second primary surface. The duct has a first section, within which the protrusion is disposed, and a second section, which is connected to the first section and is adjacent at the reverse side from the side of the first section at which the protrusion is disposed. The height of the first substrate is greater than the height of the second section along the thickness direction.
申请公布号 WO2015080266(A1) 申请公布日期 2015.06.04
申请号 WO2014JP81630 申请日期 2014.11.28
申请人 KYOCERA CORPORATION 发明人 INOUE, TOMOYUKI
分类号 B01J19/00;C04B37/00;C23C16/44;H01L21/02;H01L21/205;H01L21/3065 主分类号 B01J19/00
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