发明名称 HARD LUBRICATING COATING FILM AND HARD LUBRICATING COATING FILM-COVERED TOOL
摘要 Provided are: a hard lubricating coating film which is hard and has wear resistance; and a hard lubricating coating film-covered tool. A hard coating film (10), which is hard and has wear resistance, and an end mill (12) can be obtained by alternately forming two or more (CraMobWcVdBe)1-x-yCxNy layers A (22) and two or more (CraMobWcVdBe)1-x-y-zCxNyOz layers B (24) by controlling the composition ratios of Cr, Mo, W, V and B and various reaction gases during the film formation, or alternatively by controlling only the various reaction gases during the film formation. In this connection, the atomic ratios a-e, y and (x + y) of the layers A (22) are within predetermined ranges; the atomic ratios a-e, x, y, z and (x + y + z) of the layers B (24) are within predetermined ranges; the film thickness (D1) of the layers A (22) is within the range from 2 nm to 1,000 nm (inclusive); the film thickness (D2) of the layers B (24) is within the range from 2 nm to 500 nm (inclusive); and the total film thickness (D) is within the range from 0.1 μm to 10.0 μm (inclusive).
申请公布号 WO2015079505(A1) 申请公布日期 2015.06.04
申请号 WO2013JP81822 申请日期 2013.11.26
申请人 OSG CORPORATION;NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY;WANG MEI;SAKURAI MASATOSHI;SUTOU YUJI;KOIKE JUNICHI 发明人 WANG MEI;SAKURAI MASATOSHI;SUTOU YUJI;KOIKE JUNICHI
分类号 B23B27/14;B23C5/16;C23C14/08 主分类号 B23B27/14
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