EVAPORATION SOURCE AND EVAPORATION APPARATUS HAVING THE SAME

摘要

Disclosed are an evaporation source and an evaporation apparatus of a flat panel display device having the same. According to an embodiment of the present invention, the evaporation source comprises: a crucible deposited to a thin metal film of a flat panel display device, wherein an evaporation substance having a creep characteristic at a high temperature is filled and an upper portion is open, and made of an insulation material; a plurality of heaters heating the crucible for the evaporation substance to be phase-changed to vapor and separately operated by being arranged along a height direction of the crucible near the crucible; and a controller separately controlling the operation of the heaters.