| 发明名称 |
METHODS AND DEVICES FOR DETECTING OPEN AND/OR SHORTS CIRCUITS IN MEMS MICRO-MIRROR DEVICES |
| 摘要 |
According to the present invention there is provided methods and devices for detecting open and/or short circuits in MEMS micro-mirror devices, which use relative comparisons of voltage levels within the MEMS micro-mirror devices for detecting the occurrence of open and/or short circuits. |
| 申请公布号 |
WO2015078482(A1) |
申请公布日期 |
2015.06.04 |
| 申请号 |
WO2013EP74432 |
申请日期 |
2013.11.22 |
| 申请人 |
INTEL CORPORATION |
发明人 |
CHEVALLAZ, ERIC;ABELÉ, NICOLAS |
| 分类号 |
G02B26/08;G09G3/34 |
主分类号 |
G02B26/08 |
| 代理机构 |
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