| 摘要 |
<p>The present invention provides a lead-out electrode by which it is possible to attain an ion beam having a high degree of straightness. This lead-out electrode (1) is provided with: an insulating layer (2) made of an anodic oxide film; an acceleration electrode (3) disposed on one surface of the insulating layer (2); and a plurality of through-holes (4) passing through the acceleration electrode (3) and the insulating layer (2) in the thickness direction, the aspect ratio (average length (5)/average opening diameter (6)) of the penetrating hole (4) being 16 to 1000 inclusive.</p> |
