| 摘要 |
PROBLEM TO BE SOLVED: To provide a precision measuring device capable of achieving a precision measurement with high speed and high precision. ! SOLUTION: A precision measurement device 10 is stored with a plurality of measurement units 14a, 14b, a controller 16, and a computer 18 in one housing 12. The measurement units 14a, 14b can simultaneously measure different desired regions on the same work 24. The controller 16 can simultaneously control the operations of the respective measurement units 14a, 14b. The computer 18 obtains desired information of the work 24 based on position information from the respective measurement units 14a, 14b, and the measurement units 14a, 14b are stored in the one housing 12 by two or more arbitrary numbers at arbitrary positions. ! COPYRIGHT: (C)2015,JPO&INPIT |
