| 发明名称 |
NOZZLE AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING THE SAME |
| 摘要 |
A nozzle may include a nozzle body, a conductive line and a resistance-measuring member. The nozzle body may include a plurality of injecting holes. The conductive line may be disposed along the injecting holes. The resistance-measuring member may be configured to measure a resistance of the conductive line to detect a deformation of the injecting holes. |
| 申请公布号 |
US2015151336(A1) |
申请公布日期 |
2015.06.04 |
| 申请号 |
US201414301515 |
申请日期 |
2014.06.11 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM KYOUNG-SEOB;KANG SUCK-HYUN;KO YONG-SUN;KIM KYOUNG-HWAN;LEE KUN-TACK;LEE HYO-SAN |
| 分类号 |
B08B3/02;H01L21/67;H01L21/02 |
主分类号 |
B08B3/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A nozzle comprising:
a nozzle body including a plurality of injecting holes; a conductive line disposed along the injecting holes; and a resistance-measuring member configured to measure a resistance of the conductive line to detect a deformation of the injecting holes. |
| 地址 |
Suwon-si KR |
