发明名称 MEMORY DEVICE AND THE FABRICATION METHOD THEREOF
摘要 <p>The present invention relates to a memory device and, more specifically, to a memory device which comprises a source and a drain separated and facing on both sides of a channel area; a tunneling insulation film formed on the channel area; a nanoparticle layer formed on the tunneling insulation film; a control gate insulation film formed on the nanoparticle layer; and a control gate formed on the control gate insulation film, wherein the nanoparticle layer includes nanoparticles arranged to be separated from each other, and average diameter of the nanoparticles is 0.5-1.2 nm.</p>
申请公布号 KR20150061194(A) 申请公布日期 2015.06.04
申请号 KR20130144988 申请日期 2013.11.27
申请人 SK INNOVATION CO., LTD. 发明人 KIM, JUN HYUNG;LEE, YOUNG KEUN;YOU, HONG
分类号 H01L27/115 主分类号 H01L27/115
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