发明名称 TRANSFER DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a transfer device that is able to transfer a base plate to a wire cassette while restricting occurrence of arm vibration. ! SOLUTION: A loading device 100 for placing a base plate 300 into a wire cassette 200 and placing it out from the wire cassette 200 comprises: a long arm 101 arranged so as to extend in a horizontal direction; a plurality of support means 103 arranged in a line in the longitudinal direction of the arm 101, and extended/retracted between a support position for supporting the base plate 300 and a retraction position located below a wire 201 on which the base plate 300 is placed; first drive means 141 for extending/retracting a first support mean group 131 formed from some of the support means 103; second drive means for extending/retracting a second support mean group 132 formed from another some of the support means 103; and a control section that controls the first and second drive means 141, 142. ! COPYRIGHT: (C)2015,JPO&INPIT
申请公布号 JP2015103533(A) 申请公布日期 2015.06.04
申请号 JP20130240535 申请日期 2013.11.21
申请人 MURATA MACH LTD 发明人 OTA KENSAKU ; YASUDA TAKAAKI
分类号 H01L21/677 主分类号 H01L21/677
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