| 摘要 |
<p>A system and a method are disclosed for a high bandwidth linear flexure bearing, which may be particularly useful in high end accelerometers and high-precision linear servo mechanisms. Certain embodiments may apply to sensors that measure motion in one dimension. Such embodiments may substantially improve the off-axis performance of the sensors providing ultra-repeatability while maintaining linearity of motion and linearity in spring rate. Some embodiments use spring flexures (602, 702, 802, 902) and flex-couplers (604, 704, 804, 904) to support the sensor stage (601, 701, 801, 901) and connect it to the reference base (603, 703, 803, 903). Several embodiments are disclosed that may fit the needs of specific applications in the area of high-end servos and accelerometers.</p> |
