TRANSPORTING UNIT, SUBSTRATE TREATING APPARATUS, SUBSTRATE TREATING SYSTEM AND SUBSTRATE TRANSPORTING METHOD
摘要
<p>The present invention provides a transporting unit. The transporting unit for transporting a substrate comprises: a first arm to support one side of a substrate; a second arm to support the other side of the substrate; a first driver to move the first arm; and a second driver to move the second arm. The first and second drivers can be provided in different types.</p>
