| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and apparatus for forming an organic monomolecular film, capable of forming an organic monomolecular film in a short time with good controllability. ! SOLUTION: A method for forming an organic monomolecular film, capable of supplying an organic material gas to the surface of a body S to be processed to form an organic monomolecular film comprises: supplying the organic material gas including an organic molecule having a bond site forming a chemical bond with the surface of the body S to be processed, to the body S to be processed in a chamber 1; supplying excited hydrogen formed by an excited hydrogen generating mechanism 4 to the organic material gas before the organic material gas reaches the body S to be processed to substitute a terminal of the bond site of the organic molecule by hydrogen; and then forming an organic monomolecular film by the reaction of the terminal substituted by the hydrogen with the body S to be processed. ! COPYRIGHT: (C)2015,JPO&INPIT |
