| 摘要 |
A laser for generating an output wavelength of approximately 193.4 nm includes a fundamental laser, an optical parametric generator, a fourth harmonic generator, and a frequency mixing module. The optical parametric generator, which is coupled to the fundamental laser, can generate a down-converted signal. The fourth harmonic generator, which may be coupled to the optical parametric generator or the fundamental laser, can generate a fourth harmonic. The frequency mixing module, which is coupled to the optical parametric generator and the fourth harmonic generator, can generate a laser output at a frequency equal to a sum of the fourth harmonic and twice a frequency of the down-converted signal. |
| 主权项 |
1. A laser for generating an output wavelength of approximately 193.4 nm, the laser comprising:
a fundamental laser; a first frequency doubling module, coupled to the fundamental laser, for generating a second harmonic; a second frequency doubling module, coupled to the first frequency doubling module, for generating a fourth harmonic; an optical parametric generator, coupled to one of the first frequency doubling module and the fundamental laser, for generating a down-converted signal; and a frequency mixing module, coupled to the optical parametric generator and the second frequency doubling module, for generating a laser output of a frequency equal to a sum of the fourth harmonic and twice a frequency of the down-converted signal, wherein the frequency mixing module comprises two non-linear crystals, a first non-linear crystal configured to generate a frequency equal to a sum of the fourth harmonic and a frequency of the down-converted signal by type-I conversion, and a second non-linear crystal configured to generate the frequency equal to the sum of the fourth harmonic and the twice the frequency of the down-converted signal by type-II conversion, and wherein the fundamental laser generates a fundamental frequency of approximately 1064.3 nm, approximately 1053 nm, approximately 1047 nm, or approximately 1030 nm. |
