| 主权项 |
1. A processing apparatus comprising:
workpiece holding means for holding a workpiece; processing means for processing said workpiece held by said workpiece holding means; feeding means for moving said workpiece holding means in a feeding direction; bellows means mounted on said workpiece holding means for covering an area of movement of said workpiece holding means in said feeding direction, said bellows means being expansible and contractable in said feeding direction; and guide means for guiding the expansion and contraction of said bellows means in said feeding direction; said guide means having an opening for allowing the movement of said workpiece holding means in said feeding direction, a gutter extending in said feeding direction adjacent to said opening, and an end wall provided at an end of said opening in said feeding direction; said bellows means having a first connecting member connected to said workpiece holding means, a second connecting member connected to said end wall of said guide means, and a bellows member extending between said first connecting member and said second connecting member; said processing apparatus further including floating means for floating said bellows member along said gutter of said guide means in a noncontact manner. |
