| 摘要 |
PROBLEM TO BE SOLVED: To measure a work-piece with high accuracy even when a posture of a multi-joint arm mechanism changes, and distortion amounts in the respective shafts in the multi-joint arm mechanism change during measurement of the work-piece.SOLUTION: An arm type three-dimensional measuring machine 100 which has: a multi-joint arm mechanism 104 with a probe 102 at its tip; and a processing part 122 which calculates a position of the probe 102, the probe 102 being manually moved. The arm type three-dimensional measuring machine 100 comprises a six-axis force sensor a(109AA) to a six-axis force sensor f(119AA) which are provided in the respective shafts of the multi-joint arm mechanism 104, and detect force in three predetermined directions, and torque in predetermined three-axial directions to be generated in posture states of the multi-joint arm mechanism 104. The processing part 122 calculates distortion amounts in the respective axes of the multi-joint arm mechanism 104 on the basis of output of the six-axis force sensor a(109AA) to the six-axis force sensor f(119AA), and sequentially calculates the position of the probe 102 on the basis of the distortion amounts. |
