发明名称 TRANSPARENT CONDUCTIVE THIN FILM
摘要 A transparent conductive thin film and an electronic device including the same are disclosed, the transparent conductive thin film including a titanium nitride or a zirconium nitride having a heterometal element selected from zinc (Zn), gallium (Ga), indium (In), and a combination thereof.
申请公布号 US2015155065(A1) 申请公布日期 2015.06.04
申请号 US201414461639 申请日期 2014.08.18
申请人 Samsung Electronics Co., Ltd. 发明人 PARK Hyeon Cheol;KIM Kwang Hee;KWAK Chan;SON Yoon Chul;LEE Sang Mock
分类号 H01B1/02;C23C14/00;H01B1/06 主分类号 H01B1/02
代理机构 代理人
主权项 1. A transparent conductive thin film comprising: at least one of a titanium nitride and a zirconium nitride including a heterometal element selected from zinc (Zn), gallium (Ga), indium (In), and a combination thereof, wherein the at least one of titanium nitride and zirconium nitride is represented by Chemical Formula 1: A1-xMexNy  [Chemical Formula 1] wherein A is titanium (Ti) or zirconium (Zr), Me is zinc (Zn), gallium (Ga), indium (In), or a combination thereof, x is between 0.01 and 0.5, and y is between 0.8 and 1.2.
地址 Suwon-si KR