发明名称 METHOD FOR PRODUCING OPTOELECTRONIC COMPONENTS FOR ENCAPSULATING LAYERS
摘要 The invention relates to a method for producing optoelectronic components for encapsulating layers. For this purpose, a support (1) with a support main face (10) is provided. A mask (2) is applied onto the support main face (10) of the support (1). The mask (2) has a first mask layer (21) and a second mask layer (22). The mask (2) further has at least one through-hole (200) which completely passes through the mask (2) in a direction perpendicular to the support main face (10). Moreover, the first mask layer (21) has at least one undercut (201) with respect to the second mask layer (22) in the region of the through-hole (200). A functional material (4) is deposited after the mask (2) has been applied onto the support (1) such that at least one material structure (41) which is arranged on the support main face (10) is produced in the region of the through-hole (200). An encapsulation layer (5) is then deposited on at least the material structure (41). The encapsulation layer (5) is deposited such that exposed faces of the material structure (41) are completely covered by the encapsulation layer (5) before the encapsulation layer (5) is applied. In an additional step, the mask (2) is removed after the encapsulation layer (5) has been applied.
申请公布号 WO2015078919(A1) 申请公布日期 2015.06.04
申请号 WO2014EP75678 申请日期 2014.11.26
申请人 OSRAM OPTO SEMICONDUCTORS GMBH 发明人 VOM DORP, SABINE;HARTMANN, RAINER;HERZ, MARTIN;HUBER, MICHAEL
分类号 H01L33/00;C23C14/04;H01L21/027;H01L33/44;H01S5/042 主分类号 H01L33/00
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