发明名称 METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
摘要 A method for producing a semiconductor device which involves: forming a device region (17) in a center section of a semiconductor wafer (2); forming a ring-shaped reinforcing section (18), which is thicker than the device region (17), along the outer circumference of the device region (17); subjecting the semiconductor wafer (2) to a wet treatment after forming the device region (17) and the ring-shaped reinforcing section (18); rotating and drying the semiconductor wafer (2) after performing the wet treatment (2); and positioning the center position of the semiconductor wafer (2) and the center position of the ring-shaped reinforcing section (18) so as to be different.
申请公布号 WO2015079489(A1) 申请公布日期 2015.06.04
申请号 WO2013JP81754 申请日期 2013.11.26
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 NAKATA, KAZUNARI
分类号 H01L21/304 主分类号 H01L21/304
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