发明名称 圧電素子及び超音波デバイス
摘要 <p>PROBLEM TO BE SOLVED: To provide a liquid jet head and a liquid jet unit in which diffusion of bismuth to a diaphragm is prevented and an environmental load is low.SOLUTION: A liquid jet head includes: a channel forming substrate 10 in which a pressure generating chamber 12 communicating with a nozzle opening 21 is provided; a diaphragm 50 composed of a material containing silicon, provided on the channel forming substrate 10; a titanium oxide layer 56 provided on the diaphragm 50; a bismuth-containing layer 57 containing bismuth, provided on the titanium oxide layer 56; a first electrode 60 composed of platinum, provided on the bismuth-containing layer 57; a piezoelectric layer 70 composed of a piezoelectric material containing at least the bismuth, provided on the first electrode 60; and a second electrode 80 formed on the piezoelectric layer 70.</p>
申请公布号 JP5729507(B2) 申请公布日期 2015.06.03
申请号 JP20140079216 申请日期 2014.04.08
申请人 发明人
分类号 B41J2/14;H01L41/09;H01L41/187 主分类号 B41J2/14
代理机构 代理人
主权项
地址