Device and method for the manufacture of a wafer having selective positioning in the carrier system,申请号EP20140183172-传众专利搜索

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发明名称	Device and method for the manufacture of a wafer having selective positioning in the carrier system
摘要
申请公布号	EP2843712(A3)	申请公布日期	2015.06.03
申请号	EP20140183172	申请日期	2014.09.02
申请人	SILTECTRA GMBH	发明人	LICHTENSTEIGER, LUKAS;MAN, HAU-KIT;RICHTER, JAN
分类号	H01L31/18;H01L21/304;H01L21/67	主分类号	H01L31/18
代理机构		代理人
主权项
地址

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