发明名称 半導体装置
摘要 A semiconductor device includes an oxide semiconductor layer, a source electrode and a drain electrode in contact with the oxide semiconductor layer, a gate electrode overlapping with the oxide semiconductor layer, and a gate insulating layer between the oxide semiconductor layer and the gate electrode, in which the source electrode or the drain electrode comprises a first conductive layer and a second conductive layer having a region which extends beyond an end portion of the first conductive layer in a channel length direction and which overlaps with part of the gate electrode, in which a sidewall insulating layer is provided over the extended region of the second conductive layer, and in which the sidewall insulating layer comprises a stack of a plurality of different material layers.
申请公布号 JP5727816(B2) 申请公布日期 2015.06.03
申请号 JP20110035293 申请日期 2011.02.22
申请人 株式会社半導体エネルギー研究所 发明人 須沢 英臣;笹川 慎也;倉田 求
分类号 H01L29/786;H01L21/28;H01L29/417 主分类号 H01L29/786
代理机构 代理人
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