| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve piezoelectric properties in a structure in which the film thickness of a piezoelectric body is reduced on a substrate by suppressing occurrence of distribution unevenness in the thickness direction of piezoelectric materials having different crystal systems. <P>SOLUTION: A piezoelectric thin film 4 formed on a substrate is structured by alternatively laminating layers composed of the piezoelectric materials having different crystal systems in a state where columnar crystals are arrayed for every layer. The composition ratio of each piezoelectric material is the composition ratio constituting a phase boundary in which the crystal systems are changed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
