| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a rotary slide valve used in a vacuum device and including an operating-part structure that a rotary operation can be conducted with less impact. <P>SOLUTION: The slide valve includes a valve structure where a valve element is rotated by linear motion of a piston being converted to rotary motion via a pinion-rack mechanism, and a buffer groove 118 is provided on a cylindrical face of a projection 112c of the piston 112 and is tilted against an axis (in a longitudinal direction) C that a cross-sectional area expands from the bottom of the projection 112c toward one end side 111a of a cylinder body 111. Fluid inside a pressure space 113 is discharged through the buffer groove 118. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
