SILICON SUBSTRATE HAVING TEXTURED SURFACE, AND METHOD FOR MANUFACTURING SAME

摘要

Provided are a silicon substrate having a textured surface formed using a dry-etching method, and a solar cell including the substrate. In the present invention, a textured surface having a plurality of projections having three projections with a height of more than 1.5 µm to 10 µm is formed on the surface of a silicon substrate having the substrate plane orientation (111). The silicon substrate is manufactured by a step for preparing the silicon substrate having the substrate plane orientation (111), and a step for exposing the surface of the silicon substrate to etching gas.