| 摘要 |
<p>The coating source (1) for physical vapor deposition, comprises a component, which is produced from a pulverulent starting material in a powder metallurgy production process, a ferromagnetic region (5a, 5b) embedded in the component, a target (2), a back plate and a holder firmly connected with the target for a thermal connection at a cooled circulation of a coating plant, where the ferromagnetic region has a permanent-magnetic region and a ferromagnetic body from a ferromagnetic material and is introduced into the component and firmly connected to the component. The coating source (1) for physical vapor deposition, comprises a component, which is produced from a pulverulent starting material in a powder metallurgy production process, a ferromagnetic region (5a, 5b) embedded in the component, a target (2), a back plate and a holder firmly connected with the target for a thermal connection at a cooled circulation of a coating plant, where the ferromagnetic region has a permanent-magnetic region and a ferromagnetic body from a ferromagnetic material and is introduced into the component and firmly connected to the component during the powder metallurgy production process. The ferromagnetic region is arranged into the target, the back plate, and the holder. An independent claim is included for a method for producing a coating source.</p> |
