| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric element, or the like, in which improvement of reliability can be attained sufficiently. <P>SOLUTION: The piezoelectric element 240 comprises a substrate 230, a lower electrode layer 242 formed on the substrate 230, a piezoelectric layer 243 formed on the lower electrode layer 242, and an upper electrode layer 244 formed on the piezoelectric layer 243. The lower electrode layer 242 consists of a conductive oxide represented by a chemical formula ABO3 where the ratio (A/B) of A site and B site is 1.1 or higher. The piezoelectric layer 243 is composed of a perovskite type oxide ferroelectric material containing a lead zirconate titanate as a main component and formed by CSD method. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
