| 摘要 |
PROBLEM TO BE SOLVED: To provide a compound semiconductor thin film evaluation device which can detect a partial defect in a compound semiconductor thin film and inspect the whole of the compound semiconductor thin film.SOLUTION: A compound semiconductor thin film evaluation device 2 of the present invention comprises a light transmissive exterior package 4 on which an opening is formed, a light transmissive polymer gel electrolyte layer 6 disposed on inside the opening to close the opening, an electrolytic solution 12 infiltrating the polymer gel electrolyte layer 6, a light source 18 disposed on inside the exterior package 4 for irradiating a surface of the polymer gel electrolyte layer 6 facing inward of the exterior package 4 with light, a counter electrode 8 contacting with a part of the surface of the polymer gel electrolyte layer 6 facing inward of the exterior package 4, a reference electrode 10 contacting with a part of the surface of the polymer gel electrolyte layer 6 facing inward of the exterior package 4, and a potentiostat 60 to which the counter electrode 8 and the reference electrode 10 are electrically connected. |
