发明名称 自己現像層形成ポリマーおよびその組成物
摘要 Copolymers and compositions thereof useful for forming self-imageable films encompassing such copolymers are disclosed. Such copolymers encompass norbornene-type repeating units and maleic anhydride-type repeating units where at least some of such and maleic anhydride-type repeating units have been ring-opened. The films formed from such copolymer compositions provide self imageable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices.
申请公布号 JP5728790(B2) 申请公布日期 2015.06.03
申请号 JP20140520413 申请日期 2012.07.16
申请人 发明人
分类号 C08L31/00;C08F8/14;C08F222/06;C08F232/08;C08L45/00;C08L63/00 主分类号 C08L31/00
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