| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electromagnetic micromirror device capable of simultaneously achieving high rigidity and weight saving of a mirror substrate. <P>SOLUTION: An electromagnetic micromirror device 1 includes: a mirror substrate 2; and drive means for reciprocatingly vibrating the mirror substrate 2. A mirror for reflecting light beams is formed on a surface 2a of the mirror substrate 2. A structural reinforcing material 10 is formed on a rear surface 2b of the mirror substrate 2. This structural reinforcing material 10 is constituted of a three-dimensional regular array porous body and a magnetic material is contained in the structural reinforcing material 10. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
