| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a plasma generation method stabilizing ignitability in generating plasma using boron-containing gas. <P>SOLUTION: In a plasma generation method according to the present invention, boron-containing first gas is introduced into a vacuum chamber to generate plasma and a stepαin which a boron-containing thin film is formed on a workpiece is repeatedly performed. The plasma generation method comprises, as necessary, a stepβin which nitrogen or oxygen-containing second gas is introduced to generate plasma, between a specified stepαand the following stepα. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
