| 摘要 |
A controller measures positional information of a stage (WST) within an XY plane using three encoders (Enc1, Enc2 and Enc3) which at least include one each of an X encoder and a Y encoder of an encoder system, and the stage (WST) is driven in the XY plane, based on measurement results of the positional information and positional information (p 1 , q 1 ), (p 2 , q 2 ), and (p 3 , q 3 ) in a surface parallel to the XY plane of a head (encoders) (Encl, Enc2 and Enc3) used for measurement of the positional information. Accordingly, it becomes possible to control the movement of the stage with good precision, while switching the head (the encoder) used for control during the movement of the stage (WST) using the encoder system which includes a plurality of heads. |
