| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a wafer having an inspection electrode that allows easy and accurate measurement of a refractive index of the electrode in a manufacturing process of a traveling wave optical modulator and allows formation of an inspection electrode required for an inspection with an even smaller electrode pattern, and a method for measuring a refractive index of the electrode. <P>SOLUTION: A wafer having an inspection electrode comprises a wafer 1 having an electrooptic effect, a plurality of optical waveguides 2 and a plurality of traveling wave control electrodes and inspection electrodes (3, 31). The traveling wave control electrode is formed by arranging a signal electrode and a ground electrode along the optical waveguides and configured to travel an electric signal between the electrodes to control light propagating through the optical waveguides. The inspection electrodes are formed in part of the wafer. The inspection electrode has a resonance electrode (3, 31) drawn in the same drawing direction as the signal electrode. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
