发明名称 光照射装置および光照射方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a light irradiation device and a light irradiation method for reliably preventing a curing failure of an adhesive even when the amount of an inert gas to be supplied is reduced, by efficiently supplying the inert gas to the adhesive of an exposed adhesive sheet. <P>SOLUTION: The inert gas supplied to a space SP is guided to a sticking edge part SE of the adhesive sheet S by an approaching surface 22B and a recessed part 22A which are formed on the surface of a quartz glass 22. While the vicinity of the sticking edge part SE is reliably kept under the inert gas atmosphere, light of a predetermined wave length is emitted from a light emission means 4, thereby preventing the curing failure of the adhesive layer AD of the adhesive sheet. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5728265(B2) 申请公布日期 2015.06.03
申请号 JP20110071694 申请日期 2011.03.29
申请人 发明人
分类号 B29C35/08;H01L21/683 主分类号 B29C35/08
代理机构 代理人
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