发明名称 |
TECHNIQUE TO CONTROL MISALIGNMENT |
摘要 |
A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal. |
申请公布号 |
EP1390692(B1) |
申请公布日期 |
2015.06.03 |
申请号 |
EP20020728700 |
申请日期 |
2002.04.09 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
ABDULHALIM, IBRAHIM;ADEL, MIKE;FRIEDMANN, MICHAEL;FAEYRMAN, MICHAEL |
分类号 |
G01B11/00;G01N21/86;G03F7/20;G03F9/00;H01L21/027;H01L23/544 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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