| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-density and accelerated piezoelectric ejection type droplet ejection head and a method for manufacturing the same. <P>SOLUTION: A first groove 10 having a depth d1 and a width w1 is formed in a piezoelectric material substrate 1. A first electrode 51 is formed in an internal surface of the first groove 10. A second groove 20 having a depth d2 and a width w2 is formed in the piezoelectric substrate 1 so that it corresponds to the first groove. Internal surface of the first groove and the second grooved is coated with an insulating material 3. A third groove 30 having a depth d3 and a width w3 is formed in the piezoelectric material substrate 1 so that it corresponds to the first grove. A second electrode 52 is formed in an internal surface of the third groove. Accordingly, the wall 2 and a plurality of electrodes on lateral surfaces are formed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
