| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an acoustic wave device capable of retaining the air tightness of a vibration space for a long time. <P>SOLUTION: The acoustic wave device includes: an element substrate 3; an excitation electrode 5 disposed on the principal surface of the element substrate 3; and a cover 9 having a recess of which periphery is joined to the principal surface of the element substrate 3 in such a manner that the excitation electrode 5 is positioned in a vibration space 21 which is a space enclosed by the inner surface of the recess and the principal surface of the element substrate 3. On at least one of the outer surface side and the inner surface side of the junction with the element substrate 3, the cover 9 includes an extension portion 10 extending along the principal surface of the element substrate 3. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
